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  • Evgeni Gusev; Eric Garfunkel; Arthur Dideikin
    978-90-481-3807-4
    2010
    Edition 1
    • State-of-the-art reviews from leading experts in the field of MEMS/NEMS devices and technologies
    • The subject is covered from different angles, including technology, device designs, processing aspects, materials properties, characterization, microstructural studies
    • Broad coverage from technology fundamentals all the way to device applications
    • Includes supplementary material: sn.pub/extras

    €400

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