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MEMS in der Mikrosystemtechnik

Aufbau, Wirkprinzipien, Herstellung und Praxiseinsatz mikroelektromechanischer Schaltungen und Sensorsysteme

Markus Glück

978-3-663-10778-1

2005
Edition 1
- Mikroelektromechanische Sensoren - Bausteine der Mechatronik und Mikrosystemtechnik
€486

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