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  • Raja Nassar; Weizhong Dai
    978-3-662-08792-3
    2003
    Edition 1
    • First book on modelling of the processing techniques for microsystems
    • Focusses on the fabrication of high-aspect ratio microparts, namely ion beam micromachining, x-ray lithography, laser chemical vapor deposition, laser photopolimerization, laser ablation
    • Includes supplementary material: sn.pub/extras

    €280

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