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  • M. Elwenspoek; R. Wiegerink
    978-3-662-04321-9
    2001
    Edition 1
    • Gives an overview of the physics necessary to understand, design and fabricate mechanical microsensors
    • Provides a guide to the relevant literature
    • Discusses the advantages and limitations of microtechnology
    • Includes supplementary material: sn.pub/extras

    €400

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