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  • Principles, Technologies and Applications
    Takashi Hori
    978-3-642-60856-8
    1997
    Edition 1
    • The reader will obtain updated information for not only deep-submicron ULSIs having nanometer-range ultrathin gate- dielectrics but also nitrided oxides from this first book presenting them in detail so as to reach the present high state of the art.

    €154

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