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  • Yves J. Chabal
    978-3-642-56711-7
    2001
    Edition 1
    • This is the only book that addresses fundamental issues in silicon oxidation at a level that will remain useful for 10-20 years
    • Because it combines both state-of-the-art experimental approaches and theoretical methods it should become a reference book for anyone interested in studying insulators on semiconductor substrates, such as people in opto-electronics and microelectronics
    • Includes supplementary material: sn.pub/extras
    €180 €162
    10% OFF

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