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  • Diederik Depla; Stijn Mahieu
    978-3-540-76664-3
    2008
    Edition 1
    • Covers all the sputtering techniques for thin-film deposition
    • Describes the physical basics and related technical realization
    • Gives advice on controlling the sputter process and quality of the layers produced
    • Valuable reference work for researchers as well as study text for graduate students
    • Includes supplementary material: sn.pub/extras

    €639

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