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  • Athanasios Dimoulas; Evgeni Gusev; Paul C. McIntyre; Marc Heyns
    978-3-540-71491-0
    2007
    Edition 1
    • Comprehensive monograph on gate stacks in semiconductor technology
    • Covers the major latest developments and basics
    • A reference work for researchers, engineers and graduate students alike
    • Includes supplementary material: sn.pub/extras

    €280

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