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  • Seongbo Shim; Youngsoo Shin
    978-3-319-76294-4
    2018
    Edition 1
    • Introduces a highly promising patterning solution for next generation technology
    • Provides a comprehensive overview of directed self-assembly lithography (DSAL) friendly physical design and DSAL-aware mask synthesis
    • Written by leading developers of this technology

    €180

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