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  • Principles, Capabilities and Limits
    Zheng Cui
    978-3-319-39361-2
    2017
    Edition 2
    • Compares nanofabrication technologies, including their capabilities and limitations, in a consistent, reader-friendly manner
    • Contains in-depth discussions on optical lithography and electron beam lithography, based on the author’s experience having developed simulation programs for each
    • Presents practical information and examples, drawn from both primary research and industrial applications, which readers can use in realistic situations and for trouble-shooting

    €240

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