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Nanopositioning Technologies

Fundamentals and Applications

Changhai Ru; Xinyu Liu; Yu Sun

978-3-319-23853-1

2016
Edition 1
- Enriches understanding of the latest fundamentals and applications of nanopositioning technologies
- Maximizes reader insights into design/modeling/control of nanopositioning systems, nanomanipulation under scanning electron microscopes and nanopositioning for semiconductor inspection
- Reviews comprehensively key recent research into nanopositioner design, sensors, actuators, controls and emerging applications
€180 €162
10% OFF

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