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  • Fabricating Microelectromechanical Systems in Open Use Labs
    Deborah Munro
    978-3-030-33073-6
    2019
    Edition 1
    • Introduces the MEMS fabrication processes and equipment
    • Explains how to take the first steps - where to start and get initial advice and further assistance
    • Includes a global list of MEMS facilities and resources with contact information

    €100

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