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  • Sensors and Measuring Systems for Nanomanufacturing
    Wei Gao
    978-1-84996-254-4
    2010
    Edition 1
    • Presents the techniques and basics of precision nanotechnology for nanoscale manufacturing
    • Includes methods for reducing Abbe errors in various systems
    • Describes applications of nanoscale motion-control and nanoscale machining
    €418 €376
    10% OFF

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