"eBook ISBN","Title","Subtitle","Authors/editors","Copyright year","Edition","DOI","Price (EUR)","Additional info"
"978-981-15-0046-6","Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond",,"Guilei Wang",2019,"1","https://doi.org/10.1007/978-981-15-0046-6",180,""