"eBook ISBN","Title","Subtitle","Authors/editors","Copyright year","Edition","DOI","Price (EUR)","Additional info"
"978-3-662-09540-9","Prozeßtechnologie","Fertigungsverfahren für integrierte MOS-Schaltungen","N. Bündgens; Günter Schumicki; T. Evelbauer; Peter Seegebrecht; H. Fehling; J.-H. Fock; J. Frick; R. Schneider; B. Strycharczyk; F. Zimmermann",1991,"1","https://doi.org/10.1007/978-3-662-09540-9",168,""