"eBook ISBN","Title","Subtitle","Authors/editors","Copyright year","Edition","DOI","Price (EUR)","Additional info"
"978-3-662-03535-1","Ultraclean Surface Processing of Silicon Wafers","Secrets of VLSI Manufacturing","Takeshi Hattori; T. Hattori; S. Heusler; J.P. Webb",1998,"1","https://doi.org/10.1007/978-3-662-03535-1",578,""