"eBook ISBN","Title","Subtitle","Authors/editors","Copyright year","Edition","DOI","Price (EUR)","Additional info"
"978-3-319-93925-4","Metal Impurities in Silicon- and Germanium-Based Technologies","Origin, Characterization, Control, and Device Impact","Cor Claeys; Eddy Simoen",2018,"1","https://doi.org/10.1007/978-3-319-93925-4",320,""