"eBook ISBN","Title","Subtitle","Authors/editors","Copyright year","Edition","DOI","Price (EUR)","Additional info"
"978-3-0348-7741-1","Modeling of Chemical Vapor Deposition of Tungsten Films",,"Chris R. Kleijn; Christoph Werner",1993,"1","https://doi.org/10.1007/978-3-0348-7741-1",90,""