"eBook ISBN","Title","Subtitle","Authors/editors","Copyright year","Edition","DOI","Price (EUR)","Additional info"
"978-1-4757-6775-9","The Physics of Micro/Nano-Fabrication",,"Ivor Brodie; Julius J. Muray",1992,"1","https://doi.org/10.1007/978-1-4757-6775-9",400,""