"eBook ISBN","Title","Subtitle","Authors/editors","Copyright year","Edition","DOI","Price (EUR)","Additional info"
"978-1-4615-2209-6","Fundamentals of Semiconductor Processing Technology",,"Badih El-Kareh; Lou N. Hutter",1995,"1","https://doi.org/10.1007/978-1-4615-2209-6",418,""