"eBook ISBN","Title","Subtitle","Authors/editors","Copyright year","Edition","DOI","Price (EUR)","Additional info"
"978-0-387-69010-0","Silicon Devices and Process Integration","Deep Submicron and Nano-Scale Technologies","Badih El-Kareh",2009,"1","https://doi.org/10.1007/978-0-387-69010-0",200,""